bulk micromachining การใช้

• Those switches were made using bulk micromachining processes and electroplating.
• Usually, silicon wafers are used as substrates for bulk micromachining, as they can be anisotropically wet etched, forming highly regular structures.
• Bulk micromachining has been essential in enabling high performance pressure sensors and accelerometers that changed the sensor industry in the 1980s and 90's.
• Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate.
• Whereas surface micromachining creates structures " on top " of a substrate, bulk micromachining produces structures " inside " a substrate.
• Bulk micromachining is the oldest paradigm of silicon based MEMS . The whole thickness of a silicon wafer is used for building the micro-mechanical structures.
• Bulk micromachining starts with a silicon wafer or other substrates which is selectively etched, using photolithography to transfer a pattern from a mask to the surface.
• Like surface micromachining, bulk micromachining can be performed with wet or dry etches, although the most common etch in silicon is the anisotropic wet etch.
• As the structures are built on top of the substrate and not inside it, the substrate's properties are not as important as in bulk micromachining, and the expensive silicon wafers can be replaced by cheaper substrates, such as glass or plastic.